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Machine tools

ND660

Wafer manufacturing equipment

  • Max workpiece size (D x L x No.) (in) Φ26 x L20 x 1pc
  • Max workpiece size (D x L x No.) (mm) Φ660 x L500 x 1pc
  • Processing method Diamond wire
  • Machine size (W x D x H) (in) 94.5 x 185.0 x 133.9
  • Machine size (W x D x H) (mm) 2,400 x 4,700 x 3,400

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Dedicated diamond wire machine for large-diameter workpieces

Capable of processing large-diameter workpieces up to Φ660mm, and active in the quartz substrate for LCD and semiconductor target substrate industries.

  • Diamond wire adoption
  • Wafer thickness can be changed
  • Reduction of running costs

Features and benefits

Diamond wire specialized machine

High-speed machining is possible by adopting a fixed abrasive processing method using diamond wire. High productivity is also achieved by the high speed wire running speed. Reduction of kerf loss by thinner wire. Material yield is improved. Since slurry (loose abrasive) is not used, waste liquid treatment is not required, which is environmentally friendly and reduces treatment costs.

Cutting thickness can be changed

Optional wire-skipping mechanism can be attached to accommodate cutting thicknesses up to 80 mm.

Reduction of running costs

Tension control and wire path optimization reduce the number of guide rollers, thereby reducing wire usage and the risk of wire breakage.


Specifications

Metric Imperial (US)
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  • Wire running method: Uni-directional/bi-directional/switchable
  • Max wire speed (ft/min): 4265
  • Max wire speed (m/min): 1300
  • Tension range (N): 35-120
  • Wire storage capacity: Φ0.35mm × 5.5km
  • Cutting feed speed (in/min): 0.004-0.12
  • Cutting feed speed (mm/min): 0.1-3.0
  • Power source used: 480V ± 10%
  • Power consumption (kVA): 115
  • Compressed air used: 600NL / min, 0.4MPa min
  • Equipped NC: FANUC
  • Machine size (W x L x H) (mm): 2,400 x 4,700 x 3,400
  • Machine size (W x L x H) (in): 94.5 x 185.0 x 133.9
  • Machine weight (kg): 22000
  • Machine weight (lbs): 48502
  • Specialties: Wire saw